Title :
A new erase VT distribution model for reliability design in high density flash EEPROM
Author :
Chi, Min-Hwa ; Haggag, Hosam ; Bergemont, Albert
Author_Institution :
Fairchild Res. Center, Nat. Semicond. Corp., Santa Clara, CA, USA
fDate :
31 May-2 Jun 1995
Abstract :
This paper describes an improved analytical F-N channel erase and VT distribution model by including both process and cell parameters. This model is also able to predict the tightening of VT distribution after using F-N soft reprogramming techniques. The accuracy of the model is verified by measured VT curves and distribution. This new model provides a simple and useful tool for cell optimization and reliability design-in by accurately correlating VTE distribution to physical parameters of process and memory cell
Keywords :
EPROM; PLD programming; integrated circuit design; integrated circuit modelling; integrated circuit reliability; integrated memory circuits; F-N channel erase; F-N soft reprogramming techniques; cell optimization; cell parameters; erase VT distribution model; high density flash EEPROM; memory cell; process and cell parameters; reliability design; Capacitance; Design optimization; Doping; EPROM; Flash memory; Oxidation; Predictive models; Semiconductor device reliability; Semiconductor process modeling; Voltage;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1995. Proceedings of Technical Papers. 1995 International Symposium on
Conference_Location :
Taipei
Print_ISBN :
0-7803-2773-X
DOI :
10.1109/VTSA.1995.524713