Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System

Author

Yamaguchi, M. ; Yamada, Y. ; Goto, Y. ; Shikida, M. ; Sato, K.

Author_Institution

Nagoya Univ., Nagoya

fYear

2007

fDate

10-14 June 2007

Firstpage

1633

Lastpage

1636

Abstract

This paper presents the mechanical properties of silicon-based membranes windows applied for miniature electron beam radiation system. The membranes were used for the physical separation between the vacuum and atmosphere, and used as an EB-permeable membrane window. We used MEMS technologies to fabricate the thin Si-based membrane window structure. The size of each window is 6 mm in length and 2 mm in width. Four different types of membrane windows were fabricated to compare the mechanical properties. Residential stress, Young´s modulus, and breakage pressure were evaluated by using bulge test technique. SiN/SiO₂/Si membrane showed the highest breakage pressure and operated more than one thousand hours.

Keywords

Young´s modulus; electron beam effects; elemental semiconductors; fracture mechanics; internal stresses; membranes; micromechanical devices; silicon; silicon compounds; MEMS technology; SiN-SiO₂-Si; Young´s modulus; breakage pressure; bulge test technique; miniature electron beam radiation system; residential stress; silicon-based membrane window fabrication; size 2 mm; size 6 mm; Atmosphere; Biomembranes; Electron beams; Electron tubes; Mechanical factors; Silicon carbide; Silicon compounds; Stress; Testing; Windows; Electron Beam; Membrane; Residential Stress; SiC; SiN; Silicon; Young´s Modulus;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300462

Filename

4300462