DocumentCode :
3378387
Title :
Investigation of Anti-Stiction Coating for MEMS Switch using Atomic Force Microscope
Author :
Yamashita, T. ; Itoh, T. ; Suga, T.
Author_Institution :
Univ. of Tokyo, Tokyo
fYear :
2007
fDate :
10-14 June 2007
Firstpage :
1657
Lastpage :
1660
Abstract :
This article discusses anti-stiction coating for Microelectromechanical System (MEMS) switch using atomic force microscope (AFM). In the air, stiction occurs by the attractive force that arises from the capillary force generated from forming a liquid meniscus by water vapor across MEMS switch gap, and the switch does not function normally. We have measured adhesion force for Au and Pt surfaces between 10% and 85% relative humidity (RH), and compared it with that of SiO2, Si, and self-assembled monolayer (SAM) surfaces. Our measurements indicate that approximately 20 nm thick sputtered Au and Pt coatings are useful to prevent stiction of MEMS switch.
Keywords :
adhesion; atomic force microscopy; coatings; gold; humidity; microswitches; monolayers; platinum; self-assembly; silicon compounds; stiction; Au; MEMS switch; Pt; SiO2; adhesion force; antistiction coating; atomic force microscope; microelectromechanical system switch; relative humidity; self-assembled monolayer surface; Atomic force microscopy; Atomic measurements; Coatings; Force measurement; Gold; Humidity measurement; Microelectromechanical systems; Micromechanical devices; Microswitches; Switches; Coating; MEMS; stiction; switch;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
Type :
conf
DOI :
10.1109/SENSOR.2007.4300468
Filename :
4300468
Link To Document :
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