MEMS Electrometer System Simulation using a Time-Domain Variable Capacitor Model

System level simulation on a micromachined variable capacitor electrometer was implemented using a voltage source representation method creating a nonlinear time-domain variable capacitor model in SPICE. We show that a circuit model can be created for any arbitrary nonlinear capacitive MEMS element for embedded co-simulation with interface electronics. The simulation results are in good agreement with experimental data. This simple technique is proposed as a method to provide the missing link in aiding system level design optimization of both electro-mechanical structures and sensor electronics within the same simulation interface.