12.9MHz Lame-Mode Differential SOI Bulk Resonators

Author

Khine, Lynn ; Palaniapan, Moorthi ; Wong, Wai-Kin

Author_Institution

Nat. Univ. of Singapore, Singapore

fYear

2007

fDate

10-14 June 2007

Firstpage

1753

Lastpage

1756

Abstract

In this paper, differentially driven 12.9 MHz square resonators in Lame mode with two different types of anchor - T-anchor and straight beam anchor are presented in an attempt to investigate how the anchor design influences the quality factor, Q values. These square resonators operated in a vacuum pressure of 36 muTorr exhibited Q values of 807,000 and 404,000, respectively. This difference in Q values for the two resonators is probably due to differing energy losses in their respective anchors. These resonators were fabricated using SOIMUMPs process from MEMSCAP.

Keywords

Q-factor; bulk acoustic wave devices; micromechanical resonators; silicon-on-insulator; MEMSCAP; SOIMUMP process; T-anchor; lame-mode differential SOI bulk resonators; quality factor; square resonators; straight beam anchor; Acoustic beams; Damping; Energy loss; Geometry; Micromechanical devices; Optical resonators; Predictive models; Q factor; Radio frequency; Solid state circuits; LamÃ© mode; MEMS; Q; T-anchor; resonators; straight beam anchor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300492

Filename

4300492