Title :
12.9MHz Lame-Mode Differential SOI Bulk Resonators
Author :
Khine, Lynn ; Palaniapan, Moorthi ; Wong, Wai-Kin
Author_Institution :
Nat. Univ. of Singapore, Singapore
Abstract :
In this paper, differentially driven 12.9 MHz square resonators in Lame mode with two different types of anchor - T-anchor and straight beam anchor are presented in an attempt to investigate how the anchor design influences the quality factor, Q values. These square resonators operated in a vacuum pressure of 36 muTorr exhibited Q values of 807,000 and 404,000, respectively. This difference in Q values for the two resonators is probably due to differing energy losses in their respective anchors. These resonators were fabricated using SOIMUMPs process from MEMSCAP.
Keywords :
Q-factor; bulk acoustic wave devices; micromechanical resonators; silicon-on-insulator; MEMSCAP; SOIMUMP process; T-anchor; lame-mode differential SOI bulk resonators; quality factor; square resonators; straight beam anchor; Acoustic beams; Damping; Energy loss; Geometry; Micromechanical devices; Optical resonators; Predictive models; Q factor; Radio frequency; Solid state circuits; Lamé mode; MEMS; Q; T-anchor; resonators; straight beam anchor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300492
