DocumentCode
3379116
Title
A Passive Microfluidic Valve using Superhydrophobic/Hydrophilic Nanostructures for Lab-on-A-Chip (LOC) Systems
Author
Londe, G. ; Wesser, A. ; Cho, H.J. ; Zhai, L. ; Chunder, A. ; Subbarao, S.
Author_Institution
Univ. of Central Florida, Orlando
fYear
2007
fDate
10-14 June 2007
Firstpage
1801
Lastpage
1804
Abstract
This paper describes a passive microfluidic valve, which has an integrated superhydrophobic surface in one of the channels to selectively inhibit the flow of water based reagents and pass aqueous solutions containing surfactants. The microchannels were fabricated by standard photolithography and wet etching techniques. The superhydrophobic polymer patch was fabricated using the layer-by-layer (LBL) deposition technique, in which multiple layers of polyelectrolytes were coated on a channel wall followed by silica nanoparticle treatment. The channels were sealed with a polydimethylsiloxane (PDMS) slab by treating under oxygen plasma. The fabricated microfluidic valve was tested with liquids flowing in the microchannels under capillary action. It is shown that the valve selectively regulates the flow of test samples. The water sample stops at the front of superhydrophobic patch and the 2-isopropanol flows through the channels without any resistance.
Keywords
etching; lab-on-a-chip; microchannel flow; nanoparticles; photolithography; polymer electrolytes; silicon compounds; SiO2; hydrophilic nanostructures; lab-on-a-chip; layer-by-layer deposition; microchannel flow; passive microfluidic valve; photolithography; polyelectrolytes; silica nanoparticle treatment; superhydrophobic nanostructures; superhydrophobic polymer; wet etching; Lab-on-a-chip; Lithography; Microchannel; Microfluidics; Nanostructures; Polymer films; Silicon compounds; Testing; Valves; Wet etching; Hydrophilic; Layer by Layer(LBL) deposition; Nanoparticles; Passive valve; Superhydrophobic;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300504
Filename
4300504
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