DocumentCode
3379193
Title
Novel Hybrid Material Formicrofluidic Devices
Author
Aura, Susanna ; Sikanen, Tiina ; Kotiaho, Tapio ; Franssila, Sami
Author_Institution
Helsinki Univ. of Technol., Espoo
fYear
2007
fDate
10-14 June 2007
Firstpage
1821
Lastpage
1824
Abstract
We demonstrate fabrication of microchannels from hybrid material ORMOCER with both conventional UV-lithography and UV-embossing. Enclosed microchannels are produced by ORMOCER- ORMOCER bonding as well as with PDMS cover. A lithographically defined ORMOCER/PDMS capillary electrophoresis (CE) device is fabricated and the electro-osmotic mobility is measured with different buffer conditions. Peptide separation in CE channel is also demonstrated.
Keywords
embossing; microfluidics; polymers; ultraviolet lithography; ORMOCER-ORMOCER bonding; PDMS capillary electrophoresis; UV-embossing; UV-lithography; electro-osmotic mobility; microchannel fabrication; microfluidic device; Adhesives; Bonding; Chemical technology; Chemistry; Electrokinetics; Laboratories; Microchannel; Optical materials; Polymers; Spine; ORMOCER; bonding; capillary electrophoresis; embossing; lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300509
Filename
4300509
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