A Microsystem Chip for the Manipulation of Bio-Particles Via AC Electrokinetics Array

In this paper, a novel active micro-chip for the manipulation of micro-particles based on the alternating current electro-osmosis flow, which is induced by the specific tri-concentric circle microelectrodes array, has been successfully developed and demonstrated. The concentric circle microelectrodes are non-planar with part of the microelectrode surface deposited with a patterned SiO₂ dielectric layer. This proposed design could not only trap the bio-particles as early report did but also transport the particles among traps. From the experimental demonstration, the manipulation of single bio- particle without the coupling effect among adjacent traps has been verified. The electrolysis phenomena have been also reduced during the functional manipulation via our microsystem design.