Title :
EIS-Capacitor-Based LC Wireless Chemical Sensors
Author :
Garcia-Canton, J. ; Moreno, L. ; Jimenez, C. ; Merlos, A. ; Baldi, A.
Author_Institution :
Centro Naconal de Microelectron. (CNM-IMB, Bellaterra
Abstract :
The development of new wireless sensors for the measurement of different chemical parameters is reported. A high quality factor EIS (Electrolyte-Insulator-Silicon) capacitor is used as an electrochemical potential-to-capacitance transductor to obtain a LC wireless pH sensor. Measurement of conductivity with the same sensor has been also achieved by exciting it at a different frequency. Detection of other ions than [H+] by deposition of ion selective membranes is demonstrated as well.
Keywords :
chemical sensors; electrical conductivity measurement; electrolytes; electrolytic capacitors; EIS-capacitor; LC wireless chemical sensors; conductivity measurement; electrochemical potential-to-capacitance transductor; electrolyte-insulator-silicon capacitor; pH sensor; Capacitance; Capacitive sensors; Capacitors; Chemical sensors; Conductivity measurement; Frequency measurement; Impedance; Magnetic sensors; Resonant frequency; Wireless sensor networks; EIS capacitor; LC sensor; conductivity sensor; ion sensor; pH sensor; wireless sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300530
