Title :
10 GHz range extremely low-loss ladder type surface acoustic wave filter
Author :
Odagawa, Hiroyuki ; Yamanouchi, Kazuhiko
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
Here we investigate a 10 GHz range low-loss SAW filter using a ladder type structure. It is fabricated on 128° Y-X LiNbO3 using direct writing electron beam (EB) lithography techniques and lift-off process. Sub-0.1 μm Al electrodes with the width of 95 nm and thickness of 30 nm are fabricated successfully. Experimental results show extremely low loss characteristics. The minimum insertion loss of 3.4 dB in 10 GHz range and much reduction of the electromagnetic feed through of more than 25 dB range are obtained. They show the potential of SAW devices for 10 GHz range communication systems
Keywords :
electron beam lithography; equivalent circuits; frequency response; ladder filters; lithium compounds; losses; microwave filters; surface acoustic wave resonator filters; 0.1 micron; 10 GHz; 128 degree Y-X LiNbO3; 3.4 dB; 30 nm; 95 nm; Al; Al electrodes; LiNbO3; direct writing EB lithography; electron beam lithography; extremely low-loss characteristics; insertion loss; ladder type SAW filter; lift-off process; surface acoustic wave filter; Acoustic waves; Electrodes; Electron beams; Feeds; Insertion loss; Lithography; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Writing;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762108
