Investigation of leaky surface acoustic waves on quartz substrates in the range of Euler angle (0°, 124°, γ)

Author

Tong, Xiaojum ; Zhang, De

Author_Institution

Inst. of Acoust., Nanjing Univ., China

Volume

1

fYear

1998

fDate

1998

Firstpage

155

Abstract

This paper presents the propagation properties of leaky shear surface acoustic wave (one type of leaky surface acoustic wave) on quartz substrate in the range of Euler angles (0°, 124°, γ). Both theoretical and experimental results show that at γ=0° and 90°, the pure shear horizontal polarized surface acoustic waves can be excited strongly, and the wave velocity can be up to about 5100 m/s; that is much higher than that of normal surface acoustic waves. However a serious power flow deviation will happen near γ=90°; for example, when the propagation direction is 3° away from γ=90°, the power flow angle can be up to 9°. Other properties, such as attenuation. temperature coefficients etc. are also discussed in this paper

Keywords

piezoelectric materials; quartz; surface acoustic wave devices; surface acoustic waves; ultrasonic propagation; ultrasonic velocity; 5100 m/s; Euler angle; SiO₂; attenuation; leaky surface acoustic waves; power flow deviation; propagation properties; pure shear horizontal polarized waves; quartz substrate; temperature coefficients; wave velocity; Acoustic propagation; Acoustic waves; Attenuation; Frequency; Load flow; Metallization; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.762121

Filename

762121