Title :
Investigation of leaky surface acoustic waves on quartz substrates in the range of Euler angle (0°, 124°, γ)
Author :
Tong, Xiaojum ; Zhang, De
Author_Institution :
Inst. of Acoust., Nanjing Univ., China
Abstract :
This paper presents the propagation properties of leaky shear surface acoustic wave (one type of leaky surface acoustic wave) on quartz substrate in the range of Euler angles (0°, 124°, γ). Both theoretical and experimental results show that at γ=0° and 90°, the pure shear horizontal polarized surface acoustic waves can be excited strongly, and the wave velocity can be up to about 5100 m/s; that is much higher than that of normal surface acoustic waves. However a serious power flow deviation will happen near γ=90°; for example, when the propagation direction is 3° away from γ=90°, the power flow angle can be up to 9°. Other properties, such as attenuation. temperature coefficients etc. are also discussed in this paper
Keywords :
piezoelectric materials; quartz; surface acoustic wave devices; surface acoustic waves; ultrasonic propagation; ultrasonic velocity; 5100 m/s; Euler angle; SiO2; attenuation; leaky surface acoustic waves; power flow deviation; propagation properties; pure shear horizontal polarized waves; quartz substrate; temperature coefficients; wave velocity; Acoustic propagation; Acoustic waves; Attenuation; Frequency; Load flow; Metallization; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Transducers;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762121
