Title :
Dynamic Characterization of Thermo-Resistive Micro-Sensor
Author :
Lira, José G A ; Oliveira, Alexandre Cunha ; Freire, Raimundo C S ; Doi, Ioshiaki ; Luciano, Benedito A. ; Swart, Jacobus W.
Author_Institution :
DEE, Fed. Univ. of Campina Grande
Abstract :
In the fabrication process of thermo-resistive sensors, the dynamic response of a sensor is a very important feature to be noted. The dynamic characterization of a sensor reflects his electric performance when submitted to power variations. By measuring these power variations, it is possible to evaluate some of the sensor´s thermoelectric properties, and so optimize its physic configuration in the fabrication process and its subsequent use in specific applications. In this paper, the influence of the micromachined thermo-resistive sensors substrate in the determination of its thermal time constant is evaluated
Keywords :
dynamic response; microsensors; temperature sensors; dynamic characterization; dynamic response; electric performance; power variations; thermal time constant; thermo-resistive microsensor; thermoelectric properties; Electrical resistance measurement; Fabrication; Frequency response; Gas detectors; Jacobian matrices; Power measurement; Sensor phenomena and characterization; Silicon; Temperature sensors; Thermal sensors;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE
Conference_Location :
Ottawa, Ont.
Print_ISBN :
0-7803-8879-8
DOI :
10.1109/IMTC.2005.1604448
