Determination of phase velocity and attenuation of surface acoustic waves with improved accuracy

Author

Thomas, R. ; Johannes, T.W. ; Ruile, Werner ; Weigel, R.

Author_Institution

Siemens AG, Munich, Germany

Volume

1

fYear

1998

fDate

1998

Firstpage

277

Abstract

The phase velocity and the attenuation of surface acoustic waves (SAW) are determined for Rayleigh waves on free and metallized quartz substrates. The measurement setup and the evaluation procedure based on the direct modeling of the phase for the transmitted signal are discussed. The used method is compared to other evaluation techniques. The results for the phase velocity are given and compared to theoretical values determined with a boundary element method (BEM). Parameter values for an improved model are extracted for the phase velocity as well as for the attenuation. The model is applied to the simulation of TCF-resonators and a comparison between experiment and simulation is performed

Keywords

Rayleigh waves; acoustic wave absorption; acoustic wave velocity; boundary-elements methods; quartz; substrates; surface acoustic wave resonators; surface acoustic waves; Rayleigh waves; SAW; SiO₂; TCF-resonators; attenuation; boundary element method; direct modeling; evaluation procedure; free quartz substrate; measurement setup; metallized quartz substrate; phase velocity; simulation; surface acoustic waves; transmitted signal; Acoustic measurements; Acoustic transducers; Acoustic waves; Attenuation; Phase measurement; Surface acoustic wave devices; Surface acoustic waves; Testing; Ultrasonic transducers; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.762145

Filename

762145