Title :
The effect of temperature on dielectric charging of capacitive MEMS
Author :
Koutsoureli, M. ; Michalas, L. ; Papaioannou, G.
Author_Institution :
Phys. Dept., Univ. of Athens, Athens, Greece
Abstract :
The present paper investigates the effect of temperature on the charging process in dielectric films of MEMS capacitive switches. The investigation includes the assessment of MIM capacitors and MEMS capacitive switches. The data analysis shows that the dielectric charging is thermally activated and the process can be described by a system with a wide distribution of relaxation times that exhibits power-law relaxation. The activation energies obtained from MIM and MEMS are attributed to different charge collection mechanisms.
Keywords :
MIM devices; capacitors; dielectric thin films; microswitches; MEMS capacitive switches; MIM capacitors; dielectric charging; dielectric films; power-law relaxation; Current measurement; Dielectric films; Dielectrics; Electric fields; Electrodes; Micromechanical devices; Temperature measurement; capacitive MEMS; dielectric charging; dielectrics;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2011 IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-9113-1
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2011.5784490
