High power-durable and low loss single-crystalline Al/Ti electrodes for RF SAW devices

Author

Kimura, Noritoshi ; Nakano, Masahiro ; Sato, Katsuo

Author_Institution

Adv. Products Dev. Center, TDK Corp., Ichikawa, Japan

Volume

1

fYear

1998

fDate

1998

Firstpage

315

Abstract

In order to improve the power-durability of the electrodes in a RF SAW device, single-crystalline Al/Ti films were successfully grown on 64°Y-X LiNbO₃ substrates by the conventional electron-beam vapor deposition technique. It is clear that the insertion loss of RF SAW filters with the single-crystalline electrodes was lower by about 0.1 dB compared with those with polycrystalline Al electrodes. Moreover, the time to failure for the single-crystalline electrodes became approximately 700 times longer than that for Al-Cu alloy electrodes which have been widely used in high-power RF SAW devices

Keywords

aluminium; electrodes; electron beam deposition; losses; surface acoustic wave filters; titanium; 0.1 dB; 64°Y-X LiNbO₃ substrates; Al-Ti; LiNbO₃; RF SAW devices; SAW filters; electron-beam vapor deposition; insertion loss; power-durability; single-crystalline Al/Ti electrodes; single-crystalline films; time to failure; Aluminum alloys; Ambient intelligence; Artificial intelligence; Chemical vapor deposition; Electrodes; Radio frequency; Scanning electron microscopy; Stress; Substrates; Surface acoustic wave devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.762154

Filename

762154