Title :
Suppression of attenuation of leaky surface acoustic waves by loading dielectric thin-film
Author :
Kakio, Shoji ; Hishinuma, Kenji ; Nakagawa, Yasulliko
Author_Institution :
Fac. of Eng., Yamanashi Univ., Kofu, Japan
Abstract :
The attenuation characteristics of leaky surface acoustic waves (LSAWs) on rotated Y-cut X-propagating LiNbO3 loaded with dielectric thin-films such as Ta2O5 and SiO2 were investigated theoretically and experimentally. The calculated attenuation as a function of the rotation angle from the Y-axis showed that the rotation angle giving the zero-attenuation shifts as the film-thickness is increased. This means that, within a certain range of the rotation angle, the attenuation can be suppressed by choosing the kind of film and its thickness. In fact, for the two cases of the free surface of 64° Y-X LiNbO3 with RF-sputtered Ta2O5 film and the metallized surface of 41° Y-X LiNbO3 with RF-sputtered SiO2 film, the measured propagation losses decreased to 1/4~1/2 in comparison to the sample without a film
Keywords :
acoustic wave absorption; lithium compounds; surface acoustic waves; LiNbO3; RF-sputtered films; SiO2; Ta2O5; attenuation characteristics; dielectric thin-film loading; film-thickness; leaky surface acoustic waves; propagation losses; rotated Y-cut X-propagating LiNbO3; rotation angle; Acoustic waves; Acoustical engineering; Attenuation; Dielectric thin films; Metallization; Piezoelectric films; Propagation losses; Surface acoustic wave devices; Surface acoustic waves; Surface waves;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762158
