Title :
Influence of surface processing on temperature properties of acoustic wave
Author :
Zhang, X.R. ; Wu, D.S. ; Zhang, F. ; Gan, C.M. ; Lu, Z.N.
Author_Institution :
Inst. of Acoust., Nanjing Univ., China
Abstract :
The influence of surface processing on temperature coefficient of velocity of surface acoustic wave is investigated. The experimental results shown that the velocity temperature coefficient can be improved by diffusion of Ti ion into the surface of Y-Z LiNbO3. The value of improvement depends on the surface processing parameters, such as the processing time, and thickness of Ti film deposited at the surface of sample. The improvement of the velocity temperature coefficient can reach 22%. There is a critical concentration ratio of Ti and Nb ions which exists for improvement of the coefficient. We also calculate the velocity temperature coefficient due to surface processing by using perturbation theory. It can fit with experiment results. The detailed results and discussions are presented in this article
Keywords :
acoustic wave velocity; lithium compounds; perturbation theory; piezoelectric materials; surface acoustic wave devices; surface acoustic waves; surface diffusion; surface treatment; titanium; LiNbO3; LiNbO3:Ti; Ti; Ti ion diffusion; Y-Z LiNbO3; acoustic wave; critical concentration ratio; film thickness; perturbation theory; processing time; surface acoustic wave; surface processing; temperature coefficient of velocity; temperature properties; Acoustic waves; Delay effects; Lithium niobate; Niobium; Propagation delay; Surface acoustic wave devices; Surface acoustic waves; Surface fitting; Temperature dependence; Transducers;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762161
