Title :
A wireless AQP pressure sensor using chirped SAW delay lines structures
Author :
Reindl, L. ; Ruppel, C.C.W. ; Riek, K. ; Pankratz, T. ; Weigel, R.
Author_Institution :
Corp. Technol., Siemens AG, Munich, Germany
Abstract :
We report of the design of a SAW delay line developed for a wireless pressure sensing system operating in the 434 MHz ISM-band. The structure is a one port configuration fabricated on quartz 37.5°rotYX. It is hermetically sealed in all-quartz-package (APQ) technology with the SAW structure being placed on a diaphragm inside the cavity. The sensor allows for the measurement of absolute pressure values in the range from 0 to 8.5 bar. The SAW structure shows a linear phase although it incorporates chirped SAW components for enhancing the sensor sensitivity. The SAW structure is built up of two overlap-weighted dispersive split finger interdigital transducers (IDTs). An improvement of the sensor sensitivity by a factor of 32 compared to systems using non-dispersive SAW components has been achieved
Keywords :
interdigital transducers; packaging; pressure sensors; radio equipment; surface acoustic wave delay lines; surface acoustic wave sensors; surface acoustic wave transducers; IDT; absolute pressure values; all-quartz-package; chirped SAW delay lines structures; linear phase; one port configuration; overlap-weighted dispersive split finger interdigital transducers; sensor sensitivity; wireless AQP pressure sensor; wireless pressure sensing system; Chirp; Delay lines; Dispersion; Fingers; Hermetic seals; Pressure measurement; Sensor systems; Surface acoustic waves; Transducers; Wireless sensor networks;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762164
