Title :
Color CCD image sensor
Author :
Daih, Yeong-Wen ; Chien, Cheng-Chung ; Juang, Dar-Chang ; Bin, Tzer-Yaa ; Hsu, Ching-Yi ; Wu, Chang-Daw ; Zhaog, Yee-Lu ; Ho, Men-Fen ; Cheng, Ming-Hsien ; Yang, Geun-Pin ; Luo, Yau-Feng ; Horng, Chung-Hsien
Author_Institution :
ERSO, ITRI, Hsinchu, Taiwan
Abstract :
A 2/3 inch interline CCD image sensor for NTSC system with 250000 pixels has been developed. This device adopts buried channel CCD and vertical overflow drain structure for high charge transfer efficiency/low noise and good antiblooming/smear reduction capability respectively. It was fabricated by a double-p-well double-poly double-metal technology, and 1.5 μm design rule process. Gettering was also applied for dark current reduction. On chip color filter, Y/Cy/G complementary color, checkerboard pattern, was developed for color image sensing
Keywords :
CCD image sensors; colour television cameras; high definition television; 1.5 micron; 250000 pixel; HDTV; NTSC system; antiblooming/smear reduction; buried channel CCD; checkerboard pattern; colour CCD image sensor; dark current reduction; double-metal technology; double-p-well; double-poly; gettering; high charge transfer efficiency; interline CCD image sensor; low noise; vertical overflow drain structure; Charge coupled devices; Charge transfer; Charge-coupled image sensors; Colored noise; Dark current; Filters; Gettering; Noise reduction; Pixel; Process design;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1991. Proceedings of Technical Papers, 1991 International Symposium on
Conference_Location :
Taipei
Print_ISBN :
0-7803-0036-X
DOI :
10.1109/VTSA.1991.246696
