• DocumentCode
    3380296
  • Title

    WCDM2 — Wafer-level charged device model testing with high repeatability

  • Author

    Jack, Nathan ; Maloney, Timothy J. ; Chou, Bruce ; Rosenbaum, Elyse

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
  • fYear
    2011
  • fDate
    10-14 April 2011
  • Abstract
    CDM-like unipolar pulses are generated at the wafer level with excellent repeatability and linearity. Pulse width and rise time resemble that of FICDM testers. In-situ pre- and post-stress curve tracing reveals the current failure threshold for the device under test.
  • Keywords
    integrated circuit modelling; integrated circuit testing; wafer level packaging; FICDM tester; WCDM; high repeatability; unipolar pulse; wafer-level charged device model testing; Calibration; Current measurement; Discharges; Probes; Resistors; Stripline; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium (IRPS), 2011 IEEE International
  • Conference_Location
    Monterey, CA
  • ISSN
    1541-7026
  • Print_ISBN
    978-1-4244-9113-1
  • Electronic_ISBN
    1541-7026
  • Type

    conf

  • DOI
    10.1109/IRPS.2011.5784509
  • Filename
    5784509
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3380296