Current - voltage properties of piezoelectric thin film ZnO in a micromechanical force sensor

Author

Yuan, W. ; Smits, J.G. ; Dominguez, P. ; Cantor, C.R. ; Smith, C.L.

Author_Institution

Dept. of Electr. & Comput. Eng., Boston Univ., MA, USA

Volume

1

fYear

1998

fDate

1998

Firstpage

593

Abstract

A piezoelectric thin film of ZnO was investigated as the active piezoelectric material for a novel force sensor in DNA sequencing. Current-voltage measurements (I-V measurements) were carried out for the electrical characterization. It was found that the I-V curves are not only nonlinear, they are also irreversible and dependent on the electrical history. A model that explains the observed phenomena qualitatively is presented

Keywords

DNA; II-VI semiconductors; biological techniques; electric sensing devices; force sensors; micromechanical devices; piezoelectric devices; piezoelectric materials; piezoelectric thin films; semiconductor thin films; zinc compounds; DNA sequencing; I-V measurements; ZnO; active piezoelectric material; current-voltage properties; electrical characterization; electrical history; micromechanical force sensor; model; piezoelectric thin film; Chromium; Current measurement; DNA; Force sensors; Immune system; Micromechanical devices; Piezoelectric films; Substrates; Voltage; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.762220

Filename

762220