A micro ultrasonic motor fabricated by hydrothermal method (1.4 mm in diameter and 5 mm in length stator transducer)

Author

Morita, Takeshi ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro

Author_Institution

Dept. of Precision Machinery Eng., Tokyo Univ., Japan

Volume

1

fYear

1998

fDate

1998

Firstpage

671

Abstract

We succeeded in operating a micro ultrasonic motor whose cylindrical stator transducer was 1.4 [mm] in diameter and 5.0 [mm] long. A PZT thin film was deposited on the side wall of the stator transducer by improved hydrothermal method. This motor may be one of the smallest ultrasonic motors at this stage. The starting torque was 0.67 [μNm] with the conditions of 5.3 [mN] pre-load and 20 [Vp-p] input voltage. With the same conditions, maximum revolution speed was 680 [rpm]

Keywords

lead compounds; materials preparation; micromotors; piezoceramics; piezoelectric thin films; stators; torque; ultrasonic motors; 1.4 mm; 20 V; 5.0 mm; PZT; PZT thin film; PbZrO3TiO3; cylindrical stator transducer; hydrothermal method; input voltage; maximum revolution speed; micro ultrasonic motor; pre-load; starting torque; stator transducer; Electrodes; Electrostatics; Micromotors; Piezoelectric films; Rotors; Sputtering; Stators; Torque; Ultrasonic transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.762237

Filename

762237