Novel Absorption Photometry Microchip with No Reference Solution

In this paper, novel absorption photometry microchip with no reference solution is presented for the first time. The microchip solves the problem about reference solution. The novel microchip, which uses no reference solution, has sensors with three different optical path lengths. The microchip was fabricated using some MEMS process technique, for example silicon anisotropic etching with surfactant added TMAH solution to form 45-degree mirrors. Fabricated microchip was characterized with blood sample, and property of absorption photometry with no reference solution by combining plural optical path was investigated. By proposed method, absorption photometry microchip which is compatible in performance and convenience succeeded in development.