Title :
Genetic Extended-Fiber Network (GEN) Stretched Over Microbridges Fabricated by Single-Mask Inclined UV Lithography
Author :
Suzuki, Takaaki ; Hiramaru, Daisuke ; Fuke, Ariko ; Kanno, Isaku ; Kabata, Hiroyuki ; Kotera, Hidetoshi
Author_Institution :
Kyoto Univ., Kyoto
Abstract :
In this study, we propose a Genetic Extended-fiber Network (GEN) separately stretched over microbridges for DNA fiber applications. The microbridges are rapidly and easily fabricated by directly spin-coating a thick negative photoresist on a metal mask patterned glass substrate and exposing it twice from the backside of the substrate for two different exposure angles. The GEN constructed over microbridge array by centrifugal stretching can achieve high throughput stretching-and-positioning of DNA fibers and individually accessible platform for DNA fibers, on which spatial relationships of DNA fibers can be quantitatively analyzed by accurate compartmentalization.
Keywords :
DNA; arrays; bioMEMS; fibres; fluorescence; genetic engineering; genetics; masks; molecular biophysics; photoresists; spin coating; ultraviolet lithography; DNA fiber applications; DNA fiber positioning; centrifugal stretching; compartmentalization; exposure angles; fluorescent in situ hybridization analysis; genetic extended-fiber network; metal mask patterned glass substrate; microbridge array; negative photoresist spin-coating; single-mask inclined UV lithography; Assembly; Biological cells; DNA; Electronic mail; Genetics; Lithography; Marine animals; Optical fiber sensors; Resists; Throughput; DNA Fiber; FISH; Inclined UV Lithography;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300595