Modeling, fabrication and performance measurements of a piezoelectric energy converter for power harvesting in autonomous microsystems

Author

Ferrari, Marco ; Ferrari, Vittorio ; Marioli, Daniele ; Taroni, Andrea

Author_Institution

Dept. of Electron. for Autom., Brescia Univ.

Volume

3

fYear

2005

fDate

16-19 May 2005

Firstpage

1862

Lastpage

1866

Abstract

The present work deals with the energy conversion via the piezoelectric effect. A mechano-electrical energy converter based on piezoelectric thick films of lead zirconate titanate (PZT) deposited on a steel cantilever by a low-temperature process is presented. Modeling and measurement results on the performances of the piezoelectric converter are reported and their potential use in self-powered autonomous sensor devices is proposed

Keywords

cantilevers; direct energy conversion; lead compounds; micromechanical devices; piezoelectric thin films; piezoelectricity; autonomous microsystems; autonomous sensor devices; energy conversion; lead zirconate titanate; piezoelectric energy converter; piezoelectric thick films; power harvesting; Battery charge measurement; Energy conversion; Energy measurement; Fabrication; Piezoelectric effect; Power measurement; Power system modeling; Steel; Thick films; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE

Conference_Location

Ottawa, Ont.

Print_ISBN

0-7803-8879-8

Type

conf

DOI

10.1109/IMTC.2005.1604495

Filename

1604495