Title :
The development of a new class of BAW microwave acoustic devices for ecological monitoring
Author :
Mansfeld, G.D. ; Kotelyansky, I.M.
Author_Institution :
Institute of Radioengineering and Electronics, RAS, Moscow, Russia
Abstract :
The analysis of the possibilities of the development of new types of temperature, pressure, and gas BAW TFR and HBAR sensors is presented. Such devices are more high-frequency, sensitive and miniature than known SAW-sensors; they are compatible with small-size microwave aerials for wireless distance probing. A numerical analysis of the possible parameters of such devices is presented.
Keywords :
acoustic microwave devices; bulk acoustic wave devices; gas sensors; pressure sensors; temperature sensors; BAW microwave acoustic devices; HBAR sensors; TFR sensors; device parameters; ecological monitoring; gas sensor; numerical analysis; pressure sensor; temperature sensor; wireless distance probing; Acoustic devices; Electrodes; Electromagnetic measurements; Microwave devices; Microwave sensors; Monitoring; Resonant frequency; Substrates; Temperature dependence; Temperature sensors;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193544
