A Micro Diffuser/Nozzle Pump with Fins on the Sidewall

As the diffuser/nozzles are the key parts for micro diffuser/nozzle pumps, this paper reports a novel method for improving the flow efficiency by adding fins on its sidewall. The shape of the fin is imitative of the fish fins. Hence some fins fabricated through silicon micro-machining technology are integrated with the nozzle/diffusers. It has been testified that the big fins can improve the flow efficiency by 10 percent both for liquid and gas, which indicated that the corresponding pump performance would be improved by 20 percent. An excellent liquid pump performance is also gained in this paper.