DocumentCode :
3380997
Title :
Electromigration characterization of lead-free flip-chip bumps for 45nm technology node
Author :
Hau-Riege, Christine ; Yau, You-Wen ; Yu, Nick
Author_Institution :
Quality & Reliability Eng., Santa Clara, CA, USA
fYear :
2011
fDate :
10-14 April 2011
Abstract :
We have conducted electromigration experiments on lead-free SnAg flip-chip bump interconnection for 45nm technology node. We report lifetime distributions, kinetic parameters and intermetallic compound formation. Further, we discuss the impact of Ag-concentration as well as current direction on the electromigration reliability of these flip-chip bumps. Based on these analyses, we conclude that lead-free bumps lead to significantly more robust electromigration reliability than their SnPb counterparts, which render lead-free bumps a suitable replacement for the present and future technology nodes in terms of their current-carrying capability.
Keywords :
electromigration; flip-chip devices; integrated circuit interconnections; silver alloys; tin alloys; SnAg; current carrying capability; electromigration characterization; electromigration reliability; flip-chip bump interconnection; intermetallic compound formation; kinetic parameter; lead free flip-chip bumps; lifetime distribution; size 45 nm; Copper; Electromigration; Kinetic theory; Lead; Reliability; Substrates; Wires; electromigration; flip-chip bumps; lead-free;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium (IRPS), 2011 IEEE International
Conference_Location :
Monterey, CA
ISSN :
1541-7026
Print_ISBN :
978-1-4244-9113-1
Electronic_ISBN :
1541-7026
Type :
conf
DOI :
10.1109/IRPS.2011.5784540
Filename :
5784540
Link To Document :
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