A Magnetic Repulsive Force MEMS Actuator

Author

Tang, Tsung-Lin ; Yang, Hsueh-An ; Su, Han-Tang ; Fang, Weileun

Author_Institution

Nat. Tsing Hua Univ., Hsinchu

fYear

2007

fDate

10-14 June 2007

Firstpage

2235

Lastpage

2238

Abstract

This study reports a novel in-plane actuator driven by magnetic repulsive force using current on two antiparallel wires. There are three merits of this study: (1) no pull-in problem, (2) the repulsive force can be exploited as a magnetic bearing to prevent the contact of actuators with others, and (3) the magnetic repulsive force can act as a non-linear spring to dynamically couple multiple actuators/oscillators. To demonstrate the present concept, this study employed the AC eddy-current induced magnetic repulsive force to drive and to dynamic couple two Cu oscillators.

Keywords

eddy currents; magnetic bearings; magnetic forces; microactuators; springs (mechanical); AC eddy-current; MEMS actuator; antiparallel wires; magnetic bearing; magnetic repulsive force; nonlinear spring; Couplings; Electromagnetic forces; Electrostatic actuators; Magnetic levitation; Microactuators; Micromechanical devices; Oscillators; Piezoelectric actuators; Springs; Wires; Micro actuator; induced current; magnetic bearing; repulsive force;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300613

Filename

4300613