A Magnetic Repulsive Force MEMS Actuator

This study reports a novel in-plane actuator driven by magnetic repulsive force using current on two antiparallel wires. There are three merits of this study: (1) no pull-in problem, (2) the repulsive force can be exploited as a magnetic bearing to prevent the contact of actuators with others, and (3) the magnetic repulsive force can act as a non-linear spring to dynamically couple multiple actuators/oscillators. To demonstrate the present concept, this study employed the AC eddy-current induced magnetic repulsive force to drive and to dynamic couple two Cu oscillators.