Title :
Fabrication and Characterization of the Piezoelectric Microcantilever Integrated with PZT Thin-Film Microforce Sensor and Actuator
Author :
Liu, Mengwei ; Cui, Tianhong ; Wang, Liding
Author_Institution :
Chinese Acad. of Sci., Beijing
Abstract :
The paper presents a technology platform for micromanipulation systems based on the piezoelectric cantilevers integrated with PZT thin-film micro force sensors and actuators. Two novel piezoelectric microcantilevers with two-segment and bimorph sol-gel PZT films were designed, fabricated by bulk micromachining and tested. The sensing and actuation capability of two-segment PZT microcantilevers as microforce sensors or actuators was characterized. The sensing performance of bimorph PZT microcantilevers was compared with the conventional unimorph microcantilever. The piezoelectric constant d31 of PZT films were measured without poling process.
Keywords :
cantilevers; force sensors; lead compounds; microactuators; micromanipulators; microsensors; piezoelectric devices; sol-gel processing; thin film sensors; PZT thin-film microforce sensor; bimorph sol-gel films; bulk micromachining; microactuator; micromanipulation systems; piezoelectric constant; piezoelectric microcantilever; poling process; Electrodes; Fabrication; Mechanical sensors; Paper technology; Piezoelectric actuators; Piezoelectric films; Rapid thermal annealing; Sensor phenomena and characterization; Sensor systems; Thin film sensors; PZT thin film; Piezoelectric microcantilever; microactuator; microsensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300618
