Title :
Transparent SU-8 Three-Axis Micro Strain Gauge Force Sensing Pillar Arrays for Biological Applications
Author :
Klejwa, N. ; Harjee, N. ; Kwon, R. ; Coulthard, S.M. ; Pruitt, B.L.
Author_Institution :
Stanford Univ., Stanford
Abstract :
This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and forces exerted during locomotion by small organisms such as fruit flies (Drosophila melanogaster), including: 1 muN force sensitivity, >25 muN range, and bio-compatibility By virtue of its three-axis capability, this sensor has flexible applications for biological and non-biological force sensing.
Keywords :
force sensors; sensor arrays; strain gauges; transparency; Drosophila melanogaster; biocompatibility; biological applications; force sensitivity; fruit flies; metal on quartz substrates; standard inverted microscopes; tactile sensitivity; three axis micro strain gauge force sensing pillar arrays; transparent SU 8; transparent sensors; Adhesives; Biosensors; Capacitive sensors; Chromium; Force measurement; Force sensors; Gold; Mechanical sensors; Sensor arrays; Strain measurement; Force Sensor; SU-8; Strain Gauge;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300619
