Flexible PCB Vertical Thermopile IR Sensor

Author

Lindeberg, Mikael ; Yousef, Hanna ; Rödjegård, Henrik ; Martin, Hans ; Hjort, Klas

Author_Institution

Uppsala Univ., Uppsala

fYear

2007

fDate

10-14 June 2007

Firstpage

2275

Lastpage

2278

Abstract

We present the design, fabrication and characterization of vertical thermopile infra-red (IR) sensors. The sensors are produced in batches in a standard flexible printed circuit board (flex PCB) material. The vertical design opens up for large area detection and longer thermopile chains. The sensors consist of series of 88 vertically interconnected thermocouples in a 75 mum thick polyimide foil (Kapton HNtrade). The sensors showed a voltage response to an IR pulse of 1.2 V/(W/mm²).

Keywords

flexible electronics; infrared detectors; optical sensors; printed circuits; temperature sensors; thermocouples; thermopiles; flexible PCB vertical thermopile IR sensor; flexible printed circuit board material; infra-red sensors; polyimide foil; size 75 mum; thermopile chains; vertically interconnected thermocouples; voltage response; Infrared sensors; Integrated circuit interconnections; Lithography; Nickel; Polyimides; Sensor phenomena and characterization; Thermal conductivity; Thermal sensors; Wet etching; Wires; IR sensor; flexible printed circuit boards; through-hole via interconnects; vertical thermopiles;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300623

Filename

4300623