Miniaturised Flexible Temperature Sensor

We propose a microfabrication technology for a flexible temperature sensor with a 100times100 mum sensing area and a probe length of 7 cm. We use a biocompatible new high temperature-resistant polyimide (U-Varnish-S, Ube, Diisseldorf, Germany) to embed a thin film platinum resistor as sensing element. The sensor is operational from 0degC up to 400degC with an accuracy of plusmn1degC at high temperatures and has a time constant of 0.05 seconds. This sensor was designed for temperature characterisation of hot steam injected for thermo-ablation of tumours via a micro-needle.