• DocumentCode
    3381453
  • Title

    Convex quartz crystal resonator of extremely high Q in 10 MHz-50 MHz

  • Author

    Watanabe, Fusako ; Watanabe, Takaya

  • Volume
    1
  • fYear
    2002
  • fDate
    8-11 Oct. 2002
  • Firstpage
    1007
  • Abstract
    The micro machine technology which uses the optical contact phenomenon together with the grinding abrasive machining technology is researched as a method of enabling the highly precise processing of quartz. We have succeeded in the development of the convex quartz crystal resonator which uses a new three-dimensional highly precise processing. The fundamental mode operation is convex quartz resonator of 10 MHz-50 MHz, and a value dose to material Q of the quartz is obtained.
  • Keywords
    Q-factor; crystal resonators; grinding; micromachining; micromechanical resonators; 10 to 50 MHz; SiO2; convex quartz crystal resonator; convex quartz resonator; fundamental mode operation; grinding abrasive machining technology; high Q; micro machine technology; optical contact phenomenon; quartz; three-dimensional highly precise processing; Abrasives; Frequency; Lenses; Machining; Manufacturing; Mass production; Mirrors; Optical resonators; Temperature; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-7582-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2002.1193566
  • Filename
    1193566