DocumentCode
3381453
Title
Convex quartz crystal resonator of extremely high Q in 10 MHz-50 MHz
Author
Watanabe, Fusako ; Watanabe, Takaya
Volume
1
fYear
2002
fDate
8-11 Oct. 2002
Firstpage
1007
Abstract
The micro machine technology which uses the optical contact phenomenon together with the grinding abrasive machining technology is researched as a method of enabling the highly precise processing of quartz. We have succeeded in the development of the convex quartz crystal resonator which uses a new three-dimensional highly precise processing. The fundamental mode operation is convex quartz resonator of 10 MHz-50 MHz, and a value dose to material Q of the quartz is obtained.
Keywords
Q-factor; crystal resonators; grinding; micromachining; micromechanical resonators; 10 to 50 MHz; SiO2; convex quartz crystal resonator; convex quartz resonator; fundamental mode operation; grinding abrasive machining technology; high Q; micro machine technology; optical contact phenomenon; quartz; three-dimensional highly precise processing; Abrasives; Frequency; Lenses; Machining; Manufacturing; Mass production; Mirrors; Optical resonators; Temperature; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-7582-3
Type
conf
DOI
10.1109/ULTSYM.2002.1193566
Filename
1193566
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