Miniature Tunneloxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminecscence Studies

Author

Niskanen, A.J. ; Ylinen, T. ; Håkansson, M. ; Suomi, J. ; Ala-Kleme, T. ; Kulmala, S. ; Franssila, S.

Author_Institution

Helsinki Univ. of Technol., Helsinki

fYear

2007

fDate

10-14 June 2007

Firstpage

2303

Lastpage

2306

Abstract

The basic principles of cathodic hot electron-induced electrochemiluminescence (HECL) and hot electron (HE) injection into aqueous electrolyte solution are shortly discussed. The applicability of miniaturized oxide-coated silicon electrodes as working electrodes in detection of electrochemiluminescent labels by HECL is studied. In addition, the fabrication processes of these tunnel oxide electrodes are described, and an immunoassay is used as an example of a real bioaffinity assay carried out using oxide-coated silicon electrodes.

Keywords

bioMEMS; electrochemistry; electroluminescent devices; elemental semiconductors; hot carriers; microelectrodes; silicon; Si; aqueous electrolyte solution; bioaffinity assay; electrochemiluminescent labels; fabrication process; hot electron electrochemistry; hot electron injection; immunoassay; miniaturized tunnel oxide-coated silicon electrodes; Chemical analysis; Chemical technology; Chemistry; Electrodes; Electron emission; Inorganic materials; Insulation; Laboratories; Metal-insulator structures; Silicon; Hot electron-induced electrochemiluminescence (HECL); Hot electrons; electrochemiluminescence (ECL); miniaturized tunnel oxide Si-electrode; oxide-coated Si-electrode;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300630

Filename

4300630