DocumentCode
3381477
Title
High quality-factor inductors integrated on Si multichip modules
Author
Zu, Larry ; Lu, Yicheng ; Frye, Robert C. ; Lau, Maureen Y. ; Chen, Sandy ; Kossives, Dean ; Hrycenko, Frank ; Lin, Jenshan ; Lin, Qing ; Tai, King L.
Author_Institution
AT&T Bell Labs., Murray Hill, NJ, USA
fYear
1995
fDate
2-4 Oct 1995
Firstpage
160
Lastpage
162
Abstract
We report high quality (Q) factor inductors fabricated on a high-resistivity (2000 Ω-cm) Si substrate with MCM technology. Q-factors of 30-40 were achieved for inductors of a few nH at 1 GHz
Keywords
Q-factor; inductors; multichip modules; silicon; 1 GHz; MCM technology; Si; high-resistivity Si substrate; integrated inductors; multichip modules; quality-factor; Contacts; Dielectric substrates; Frequency; Inductance; Multichip modules; Polyimides; Q factor; Scattering parameters; Testing; Thin film inductors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Performance of Electronic Packaging, 1995
Conference_Location
Portland, OR
Print_ISBN
0-7803-3034-X
Type
conf
DOI
10.1109/EPEP.1995.524882
Filename
524882
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