Title :
Aeromems Wall Hot-Wire Sensor Arrays on Polyimide with Through Foil Vias and Bottom Side Electrical Contacts
Author :
Buder, U. ; Henning, L. ; Neumann, A. ; Obermeier, E.
Author_Institution :
Tech. Univ. of Berlin, Berlin
Abstract :
Design and manufacturing of linear arrays consisting of forty MEMS wall-hot wires on a flexible substrate featuring through foil vias and bottom side electrical contacts are presented. Realization of through foil contacts featuring a resistance of less than 0.1 Omega is based on a specifically developed process consisting of laser-"drilling" and sputtering, which is presented in detail. Measurements conducted on a flat plate in a wind tunnel demonstrate the sophistication of the system as sensor induced flow disturbancescan not be detected. The sensor system presented therefore is an ideal tool to investigate sensitive flow phenomena like transition and separation.
Keywords :
aerodynamics; contact resistance; electric sensing devices; electrical contacts; flow sensors; flow separation; laser beam machining; microsensors; sensor arrays; sputtering; wind tunnels; aeroMEMS wall hot-wire sensor arrays; bottom side electrical contacts; contact resistance; flexible substrate; flow separation; flow transition; laser drilling; laser sputtering; linear arrays; polyimide; sensor-induced flow disturbances; through foil contacts; wind tunnel measurement; Contact resistance; Drilling; Electric resistance; Flexible manufacturing systems; Laser transitions; Micromechanical devices; Polyimides; Sensor arrays; Sensor systems; Wires; array; hot-wire; laser processing; polyimide; via;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300637
