Title :
A Displacement Sensor Based on Directional Resonant Photodetector
Author :
Choi, B.S. ; Kanamori, Y. ; Hane, K.
Author_Institution :
Tohoku Univ., Sendai
Abstract :
We describe a micro-optical displacement encoder based on resonant photodetector with directional sensitivity for the specific incident angle. A layered silicon photodetector thinner than the incident wavelength is designed to confine the light beam for the effective encoder signal detection by guided resonant effect. Fabricated device shows the highly enhanced sensitivity at the angle illuminated from scale grating of encoder. The displacement signal with submicron resolution was achieved by the proposed resonant photodetector and simple optical configuration.
Keywords :
displacement measurement; micro-optomechanical devices; nonelectric sensing devices; photodetectors; directional resonant photodetector; directional sensitivity; displacement sensor; displacement signal; light beam; microoptical displacement encoder; scale grating; simple optical configuration; Absorption; Fabrication; Gratings; High speed optical techniques; Optical interferometry; Optical sensors; Photodetectors; Resonance; Silicon; Substrates; Displacement sensor; Resonant grating; Thin-film photodetector;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300643
