Title :
Tunable micro-machined combline resonator
Author :
Chatras, Matthieu ; Baillargeat, Dominique ; Blondy, Pierre
Author_Institution :
CNRS, Univ. de Limoges, Limoges
fDate :
Aug. 31 2008-Sept. 3 2008
Abstract :
In this paper, two main objectives were validated. The first one was to propose a new topology of micromachined tunable combline resonator around 30 GHz with 60% of tunable range. The second objective was to validate a technological process. This work was validated by RF measurements.
Keywords :
circuit tuning; micromachining; micromechanical resonators; MEMS; RF measurements; resonator topology; tunable circuits; tunable micromachined combline resonator; Capacitance; Etching; Integrated circuit technology; Micromachining; Micromechanical devices; Microwave filters; Radio frequency; Resonator filters; Silicon; Tunable circuits and devices; MEMS; Tunable resonator; micro-machining;
Conference_Titel :
Electronics, Circuits and Systems, 2008. ICECS 2008. 15th IEEE International Conference on
Conference_Location :
St. Julien´s
Print_ISBN :
978-1-4244-2181-7
Electronic_ISBN :
978-1-4244-2182-4
DOI :
10.1109/ICECS.2008.4674827
