DocumentCode
3381767
Title
Tunable micro-machined combline resonator
Author
Chatras, Matthieu ; Baillargeat, Dominique ; Blondy, Pierre
Author_Institution
CNRS, Univ. de Limoges, Limoges
fYear
2008
fDate
Aug. 31 2008-Sept. 3 2008
Firstpage
206
Lastpage
209
Abstract
In this paper, two main objectives were validated. The first one was to propose a new topology of micromachined tunable combline resonator around 30 GHz with 60% of tunable range. The second objective was to validate a technological process. This work was validated by RF measurements.
Keywords
circuit tuning; micromachining; micromechanical resonators; MEMS; RF measurements; resonator topology; tunable circuits; tunable micromachined combline resonator; Capacitance; Etching; Integrated circuit technology; Micromachining; Micromechanical devices; Microwave filters; Radio frequency; Resonator filters; Silicon; Tunable circuits and devices; MEMS; Tunable resonator; micro-machining;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics, Circuits and Systems, 2008. ICECS 2008. 15th IEEE International Conference on
Conference_Location
St. Julien´s
Print_ISBN
978-1-4244-2181-7
Electronic_ISBN
978-1-4244-2182-4
Type
conf
DOI
10.1109/ICECS.2008.4674827
Filename
4674827
Link To Document