2D Cantilever Array SPM using Optical Interference

This paper proposes a 2D cantilever array SPM using optical interference for a parallel nano imaging in a large area measurement. We achieved large-scale integration with 50,000 probes fabricated with MEMS technology, and measured the optical interference patterns with CCD. The multi-probes are made of SiN by MEMS process, and the multi-probes are joined with the Pyrex glass by anodic bonding. We designed, fabricated, and evaluated the characteristics of the multi probe chip. We took some interference patterns by CCD and measured the position of them. Using image processing technique, we could detect the interference patterns. We calculated the probe height using the interference displacement and made 3D graph of the measured object surface. As a result, it was confirmed that this multi-probe chip using interference patterns is effective in measurement for a parallel nano imaging. Based on the principle, we composed the Multi-probe 2D cantilever array SPM system, and evaluated the fundamental characteristics.