Title :
Variable Nano-Grating for Tunable Filters
Author :
Zhang, X.M. ; Zhao, Q.W. ; Zhong, T. ; Yu, A.B. ; Khoo, E.H. ; Lu, C. ; Liu, A.Q.
Author_Institution :
Nanyang Technol. Univ., Singapore
Abstract :
This paper presented the design of subwavelength grating (i.e., nano-grating) for narrow-band and wide-band filter applications. The grating period can be tuned from 700 nm to 1140 nm by a rhombic-shaped thermal actuator array with a driving current of 2.7 mA, achieving a change of transmissivity by 13 dB due to the guided mode resonance. Wide-band of filtering can be obtained by use of another fixed-period grating to compensate the dispersion. Such grating design makes it practical to implement many tunable nano-optical devices.
Keywords :
diffraction gratings; micromechanical devices; nanotechnology; current 2.7 mA; fixed-period grating; microelectromechanical system; nanograting; nanooptical device; narrow-band filter; subwavelength grating; thermal actuator array; transmissivity; tunable filter; wide-band filter; Actuators; Design engineering; Gratings; Information filtering; Information filters; Micromechanical devices; Narrowband; Optical filters; Resonance; Wideband; Microelectromechanical systems (MEMS); nano-optics; subwavelength grating; thermal actuator; tunable filter;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300658
