DocumentCode
3381976
Title
Improvement of the architecture for MEMS resonator quality factor measurement
Author
Zhang, Ming ; Llaser, Nicolas ; Mathias, Hervé
Author_Institution
CNRS, Univ. of Paris XI, Orsay
fYear
2008
fDate
Aug. 31 2008-Sept. 3 2008
Firstpage
255
Lastpage
258
Abstract
In this paper, the performance analysis of our previously proposed architecture for MEMS resonator quality factor measurement is carried out in taking into account the imperfection of each functional block of the architecture. This analysis puts in evidence the impact of the imperfection of each functional block on the measurement precision and predicts the attainable measurement precision of this architecture. In order to improve the performance, an improved architecture is proposed, with which the measurement precision can be improved at least a factor of 2.
Keywords
Q-factor measurement; micromechanical resonators; MEMS resonator; measurement precision; performance analysis; quality factor measurement; Detectors; Frequency measurement; Micromechanical devices; Performance analysis; Q factor; Resonance; Resonant frequency; Temperature sensors; Time measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics, Circuits and Systems, 2008. ICECS 2008. 15th IEEE International Conference on
Conference_Location
St. Julien´s
Print_ISBN
978-1-4244-2181-7
Electronic_ISBN
978-1-4244-2182-4
Type
conf
DOI
10.1109/ICECS.2008.4674839
Filename
4674839
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