Title :
A Cmos Microsystem Combining Magnetic Actuation and In-Situ Optical Detection of Microparticles
Author :
Lehmann, U. ; Sergio, M. ; Pietrocola, S. ; Niclass, C. ; Charbon, E. ; Gijs, M.A.M.
Author_Institution :
Inst. of Microelectron. & Microsystems, Lausanne
Abstract :
We present a CMOS-based hybrid microfluidic system that combines the manipulation of magnetic microparticles through a magnetic field with in situ optical detection via single photon avalanche diodes (SPADs). Magnetic particles are actuated within a glass micro-capillary and are detected upon passage over the SPAD, where they block incident light and thus lower the photon count. The optical sensors, which are not influenced by the magnetic actuation forces, allow detecting the presence of magnetic particles of 30, 5 and 1 mum diameter, while being able to distinguish between different sizes.
Keywords :
CMOS integrated circuits; avalanche photodiodes; electromagnetic actuators; magnetic particles; micro-optomechanical devices; microfluidics; microsensors; optical sensors; particle size measurement; CMOS chip; CMOS-based hybrid microfluidic system; SPAD implementation; glass microcapillary; in-situ optical detection; magnetic actuation; magnetic actuation forces; magnetic microparticles detection; optical sensors; photon counting; single photon avalanche diodes; Biomedical optical imaging; Coils; Diodes; Magnetic fields; Magnetic particles; Optical detectors; Optical feedback; Optical saturation; Optical sensors; Optoelectronic and photonic sensors; CMOS; Magnetic Actuation; Optical Detection; Single Photon Avalanche Diode;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300677
