DocumentCode
3382314
Title
Study on magnetic lens pole piece structural parameters
Author
Zhang, Xiuyan ; Dong, Quanlin ; Cui, Yongjun
Author_Institution
Key Laboratory of Micro-Nano Measurement-Manipulation and Physics, School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China
fYear
2013
fDate
23-25 March 2013
Firstpage
500
Lastpage
503
Abstract
In the electron optical design of a magnetic lens, the selection of the gap width S and bore diameter D as the structural parameters of the pole piece system is very important. In this paper, we choose second-order finite element method to calculate the axial properties of a given magnetic lens at specified ampere-turn and beam voltage. Consequently, the axial properties with the change of three structural parameters (the gap width S, the upper bore diameter D1 and the lower bore diameter D2) are obtained.
Keywords
Finite element analysis; Lenses; Magnetic circuits; Magnetic flux density; Saturation magnetization; Structural engineering;
fLanguage
English
Publisher
ieee
Conference_Titel
Information Science and Technology (ICIST), 2013 International Conference on
Conference_Location
Yangzhou
Print_ISBN
978-1-4673-5137-9
Type
conf
DOI
10.1109/ICIST.2013.6747598
Filename
6747598
Link To Document