Title :
Study on magnetic lens pole piece structural parameters
Author :
Zhang, Xiuyan ; Dong, Quanlin ; Cui, Yongjun
Author_Institution :
Key Laboratory of Micro-Nano Measurement-Manipulation and Physics, School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, China
Abstract :
In the electron optical design of a magnetic lens, the selection of the gap width S and bore diameter D as the structural parameters of the pole piece system is very important. In this paper, we choose second-order finite element method to calculate the axial properties of a given magnetic lens at specified ampere-turn and beam voltage. Consequently, the axial properties with the change of three structural parameters (the gap width S, the upper bore diameter D1 and the lower bore diameter D2) are obtained.
Keywords :
Finite element analysis; Lenses; Magnetic circuits; Magnetic flux density; Saturation magnetization; Structural engineering;
Conference_Titel :
Information Science and Technology (ICIST), 2013 International Conference on
Conference_Location :
Yangzhou
Print_ISBN :
978-1-4673-5137-9
DOI :
10.1109/ICIST.2013.6747598
