DocumentCode
3382315
Title
The hydrid model for SAW filter
Author
Trang Hoang ; Rey, Patrice ; Vaudaine, M.-H. ; Robert, Philippe ; Benech, Ph
Author_Institution
Heterogeneous Silicon Integration Dept., CEA/LETI, Grenoble
fYear
2008
fDate
Aug. 31 2008-Sept. 3 2008
Firstpage
336
Lastpage
339
Abstract
The design, modeling, fabrication and characterization of SAW filter are presented. The hybrid model is proposed and has a good agreement with measurement. This model would be helpful to design SAW filter that takes into account the distance between two IDTs, and therefore, is also helpful for design SAW based pressure sensor in which the applied pressure will change the distance between two IDTs.
Keywords
interdigital transducers; pressure sensors; surface acoustic wave filters; surface acoustic wave sensors; surface acoustic wave transducers; IDT; SAW filter design; SAW filter fabrication; SAW-based pressure sensor; hybrid model; Acoustic measurements; Acoustic propagation; Acoustic waves; Delay lines; Equivalent circuits; Fingers; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics, Circuits and Systems, 2008. ICECS 2008. 15th IEEE International Conference on
Conference_Location
St. Julien´s
Print_ISBN
978-1-4244-2181-7
Electronic_ISBN
978-1-4244-2182-4
Type
conf
DOI
10.1109/ICECS.2008.4674859
Filename
4674859
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