DocumentCode :
3382587
Title :
NO2 Gas Sensors Based on Individual Suspended Single-Walled Carbon Nanotubes
Author :
Helbling, T. ; Durrer, L. ; Pohle, R. ; Stampfer, C. ; Goyal, A. ; Fleischer, M. ; Hierold, C.
Author_Institution :
ETH Zurich, Zurich
fYear :
2007
fDate :
10-14 June 2007
Firstpage :
2553
Lastpage :
2556
Abstract :
We report on the fabrication and measurements of the first NO2 gas sensors based on individual suspended single-walled carbon nanotubes (SWNTs). We analyze the transient current response of two types of SWNTs when exposed to NO2 in dry and humid air. Furthermore, we analyze the change in the gate characteristic of the SWNTs due to NO2 and propose two different transduction mechanisms in suspended SWNTs.
Keywords :
carbon nanotubes; gas sensors; transient response; NO2; NO2 gas sensor; SWNT; single-walled carbon nanotube; transduction mechanism; transient current response; Carbon nanotubes; Chemical sensors; Electrodes; Fabrication; Gas detectors; Gold; Intrusion detection; Substrates; Temperature sensors; Transient analysis; Carbon Nanotubes; ChemFET; Molecular Gas Sensors; NO2; Nanosensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
Type :
conf
DOI :
10.1109/SENSOR.2007.4300692
Filename :
4300692
Link To Document :
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