Title :
A Low-Cost and Highly Integrated Fiber Optical Pressure Sensor System
Author :
Ceyssens, F. ; Driesen, M. ; Wouters, K. ; Puers, R.
Author_Institution :
K ULeuven, Leuven
Abstract :
This paper presents a simple fiber-optic based pressure measurement system, in which both sensor and readout parts are constructed using batch micromachining techniques, supplemented with some straightforward assembly steps. Prototypes of relative and absolute pressure sensors parts and a readout part have been realized. Goal of this research is to enable deployment of such harsh environment sensors in high-volume, low-cost applications.
Keywords :
fibre optic sensors; micromachining; pressure sensors; absolute pressure sensors; fiber optical pressure sensor system; fiber-optic based pressure measurement system; micromachining techniques; Biomembranes; Fabry-Perot; Integrated optics; Optical fiber sensors; Optical fibers; Optical interferometry; Optical modulation; Optical sensors; Optical waveguides; Sensor systems; Optical sensors; pressure sensors; waveguides;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300704
