An accurate physics-based method for calculating DC inductance of on-chip square multi-layer inductors

An accurate physics-based method for calculating DC inductance of on-chip square multi-layer inductors is proposed in this paper. All inductor size parameters are considered in the method including metal thickness and inter-layer space. Due to its physics-based nature, the proposed method is scalable. The accuracy of the method is evaluated by comparing the calculated value with the EM simulation results in ADS for a complete set of inductors with different size parameters. It´s shown that the error between calculated values and simulation values is typically within around 3%.