Efficient floating random walk algorithm for interconnect capacitance extraction considering multiple dielectrics

Compared with traditional algorithms like finite difference, finite element and boundary element methods, the floating random walk (FRW) algorithm has advantages of lower memory usage, more scalability for large structures, and tunable accuracy. In this paper, we develop a three-dimensional FRW algorithm for multi-dielectric capacitance extraction. The techniques are presented to handle the multi-dielectric structures effectively. Numerical experiments are carried out to validate the accuracy and efficiency of proposed techniques.