Title :
The SAW resonators on LiNb03 for mass-sensing applications
Author :
Ou, Hsu-Cheng ; Zaghloul, Mona
Author_Institution :
George Washington Univ., Washington, DC, USA
fDate :
May 30 2010-June 2 2010
Abstract :
A mass-loading effect SAW resonator with shorted synchronously reflectors is presented in this work. The input and output Interdigital Transducer (IDT) has 10 pairs of aluminum electrodes on the high K LiNbO3 Substrate. The acoustic waves generated from input IDT travel to output IDT and convert into electric signals. The sensing area includes of the input, output IDTs and reflectors. The velocity and frequency of acoustic waves change when the mass is on the sensing area. The mass on the electrodes causes the mass-loading effects and decreases the center frequency. The sensitivity curve can be obtained due to the center frequency shift. In this work, the Potassium Chloride (KCL) is used to deposit on the sensing area. Different concentrations of KCL solution lead to different masses and center frequencies on the surface. According to the simulation results, it shows the linearity between the center frequency shift and the thickness of the deposited KCL layer.
Keywords :
electrodes; potassium compounds; surface acoustic wave resonators; surface acoustic wave sensors; surface acoustic wave transducers; KCl; LiNbO3; SAW resonators; acoustic waves; aluminum electrodes; center frequency shift; electric signals; input interdigital transducer; mass sensing; mass-loading effect SAW resonator; output interdigital transducer; sensitivity curve; synchronous reflectors; Acoustic transducers; Acoustic waves; Aluminum; Electrodes; Frequency; High K dielectric materials; High-K gate dielectrics; Kirchhoff´s Law; Signal generators; Surface acoustic waves;
Conference_Titel :
Circuits and Systems (ISCAS), Proceedings of 2010 IEEE International Symposium on
Conference_Location :
Paris
Print_ISBN :
978-1-4244-5308-5
Electronic_ISBN :
978-1-4244-5309-2
DOI :
10.1109/ISCAS.2010.5537659
